"EMAS 2000 - Regional Workshop on Electron Probe Microanalysis Today /4./" - Výsledky hledání - Digitální repozitář

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	Measurement of the critical energy in the SEM equipped with the cathode lens Zobačová, Jitka ; Müllerová, Ilona ; Hutař, Otakar ; Frank, Luděk Charge absorbed in a specimen during observation in SEM is a result of unbalance between incoming and emitted electrons. In a nonconductive specimen, the charge remains localized and the electric field influences the trajectories of both the primary beam and the signal electrons moving toward a detctor so that the geometry as well as the intensity scale of the image are damaged. Among the methods invented to avoid the surface charging, imaging at critical energies belongs to the most progressive ones. Úplný záznam
	Recent trends in low voltage scanning electron microscopy for the imaging of semiconductor devices Hutař, Otakar ; Müllerová, Ilona ; Romanovský, Vladimír ; Zobačová, Jitka The technology of semiconductor devices microfabrication becomes presently the main consumer of imaging methods by means of low voltage scanning electron microscopy (LVSEM). The main tasks are the inspection after lithograophic masking and etching processes, including measurements of critical linewidth dimension (CD), and the imaging of three dimensional high aspect ratio structures. Úplný záznam
	Conditions of observation of electrode masses in environmental scanning electron microscope Drnovský, Radek ; Michálek, Martin When an electrochemical battery operates, oxides and sulphides are produced on the interface between the electrode mass and collector. This causes a short battery life and less efficiency. For the study of these phenomena the observation of the structure of the surface of the electrode mass in the ESEM was chosen. The electrode mass is operated in a liquid of an electrolyte. When the specimen is observed in the classic scanning electron microscope (SEM), its surface is enormously dried by the vacuum and its state does not correspond to the original state in the battery. Observation in ESEM allows the use of working pressures in the range from tens to thousands of Pa, and the drying of the specimen is suppressed. When the working conditions in the specimen chamber are changed, the quality of given images changes too. The aim of the experiment is to determine optimum conditions for the attainment of a good-quality image of the structure of the electrode mass surface in the ESEM. Úplný záznam
	Electron sources and beam formation for X-ray microanalysis Lencová, Bohumila First we discuss the physics of beam formation in electron sources used for electron probe formation and their applicability in microprobe instruments. In the next part magnetic electron lenses in probe forming instruments are described as well as the recent developments in electron optics. Finally we sumarize the relation between the probe dimensions, size and probe current. Úplný záznam

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